TY  - RPRT
TI  - A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum
AU  - Vikram Passi
AU  - Aurélie Lecestre
AU  - Christophe Krzeminski
AU  - Guilhem Larrieu
AU  - Emmanuel Dubois
AU  - Jean-Pierre Raskin
PY  - 2011
DO  - 10.1016/j.mee.2009.11.022
UR  - https://arxiv.org/abs/1109.5187
ID  - 1109.5187
ER  -