@misc{indiciae32c1b58b5f74,
  title = {Versatile sputtering technology for Al2O3 gate insulators on graphene},
  author = {M. Friedemann and M. Woszczyna and A. Müller and S. Wundrack and T. Dziomba and Th. Weimann and Th. Seyller and F. Ahlers},
  year = {2011},
  doi = {10.1088/1468-6996/13/2/025007},
  url = {https://arxiv.org/abs/1110.1535},
  note = {Source identifier: 1110.1535}
}