@misc{indiciae317071df9606,
  title = {Tantalum nitride superconducting single-photon detectors with low cut-off energy},
  author = {Andreas Engel and Adrian Aeschbacher and Kevin Inderbitzin and Andreas Schilling and Konstantin Il'in and Matthias Hofherr and Michael Siegel and Alexei Semenov and Heinz-Wilhelm Hübers},
  year = {2012},
  doi = {10.1063/1.3684243},
  url = {https://arxiv.org/abs/1110.4576},
  note = {Source identifier: 1110.4576}
}