@misc{indiciae0aa874d4993c,
  title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations},
  author = {S. Burger and L. Zschiedrich and J. Pomplun and F. Schmidt and A. Kato and C. Laubis and F. Scholze},
  year = {2011},
  doi = {10.1117/12.896839},
  url = {https://arxiv.org/abs/1110.4760},
  note = {Source identifier: 1110.4760}
}