TY  - RPRT
TI  - Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
AU  - S. Burger
AU  - L. Zschiedrich
AU  - J. Pomplun
AU  - F. Schmidt
AU  - A. Kato
AU  - C. Laubis
AU  - F. Scholze
PY  - 2011
DO  - 10.1117/12.896839
UR  - https://arxiv.org/abs/1110.4760
ID  - 1110.4760
ER  -