@misc{indiciaecd686d62333e,
  title = {Control of Material Damping in High-Q Membrane Microresonators},
  author = {P. -L. Yu and T. P. Purdy and C. A. Regal},
  year = {2012},
  doi = {10.1103/physrevlett.108.083603},
  url = {https://arxiv.org/abs/1111.1703},
  note = {Source identifier: 1111.1703}
}