TY  - RPRT
TI  - Control of Material Damping in High-Q Membrane Microresonators
AU  - P. -L. Yu
AU  - T. P. Purdy
AU  - C. A. Regal
PY  - 2012
DO  - 10.1103/physrevlett.108.083603
UR  - https://arxiv.org/abs/1111.1703
ID  - 1111.1703
ER  -