@misc{indiciaea631b3fe276a,
  title = {Controlled oxygen vacancy induced p-type conductivity in HfO\{2-x\} thin films},
  author = {Erwin Hildebrandt and Jose Kurian and Mathis M. Müller and Thomas Schroeder and Hans-Joachim Kleebe and Lambert Alff},
  year = {2011},
  doi = {10.1063/1.3637603},
  url = {https://arxiv.org/abs/1111.2785},
  note = {Source identifier: 1111.2785}
}