TY - RPRT TI - Controlled oxygen vacancy induced p-type conductivity in HfO{2-x} thin films AU - Erwin Hildebrandt AU - Jose Kurian AU - Mathis M. Müller AU - Thomas Schroeder AU - Hans-Joachim Kleebe AU - Lambert Alff PY - 2011 DO - 10.1063/1.3637603 UR - https://arxiv.org/abs/1111.2785 ID - 1111.2785 ER -