@misc{indiciaeb3ab7783d1dc, title = {Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement}, author = {Christyves Chevallier and Frédéric Genty and Joel Jacquet and Nicolas Fressengeas}, year = {2011}, doi = {10.1016/j.optlastec.2011.09.010}, url = {https://arxiv.org/abs/1111.4101}, note = {Source identifier: 1111.4101} }