@misc{indiciaeb755cdb2b8d4,
  title = {Dopant metrology in advanced FinFETs},
  author = {G. P. Lansbergen and R. Rahman and G. C. Tettamanzi and J. Verduijn and L. C. L. Hollenberg and G. Klimeck and S. Rogge},
  year = {2011},
  url = {https://arxiv.org/abs/1111.4238},
  note = {Source identifier: 1111.4238}
}