TY - RPRT TI - Key factors of ion induced nanopatterning AU - S. Bhattacharjee AU - P. Karmakar AU - A. Chakrabarti PY - 2011 DO - 10.1016/j.nimb.2012.02.004 UR - https://arxiv.org/abs/1111.7115 ID - 1111.7115 ER -