@misc{indiciae9a4cd31259c3,
  title = {Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters},
  author = {S. Boisseau and A. B. Duret and G. Despesse and J. J. Chaillout and J. S. Danel and A. Sylvestre},
  year = {2011},
  url = {https://arxiv.org/abs/1111.7155},
  note = {Source identifier: 1111.7155}
}