TY  - RPRT
TI  - Short Communication: Stable DRIE-patterned SiO2/Si3N4 electrets for electret-based vibration energy harvesters
AU  - S. Boisseau
AU  - A. B. Duret
AU  - G. Despesse
AU  - J. J. Chaillout
AU  - J. S. Danel
AU  - A. Sylvestre
PY  - 2011
UR  - https://arxiv.org/abs/1111.7155
ID  - 1111.7155
ER  -