@misc{indiciaec06bb79eb601,
  title = {Anomaly of Film Porosity Dependence on Deposition Rate},
  author = {Stephen P. Stagon and Hanchen Huang and J. Kevin Baldwin and Amit Misra},
  year = {2011},
  doi = {10.1063/1.3683542},
  url = {https://arxiv.org/abs/1112.2145},
  note = {Source identifier: 1112.2145}
}