TY  - RPRT
TI  - Anomaly of Film Porosity Dependence on Deposition Rate
AU  - Stephen P. Stagon
AU  - Hanchen Huang
AU  - J. Kevin Baldwin
AU  - Amit Misra
PY  - 2011
DO  - 10.1063/1.3683542
UR  - https://arxiv.org/abs/1112.2145
ID  - 1112.2145
ER  -