@misc{indiciae6ebb272fe5eb, title = {Planar Superconducting Resonators with Internal Quality Factors above One Million}, author = {A. Megrant and C. Neill and R. Barends and B. Chiaro and Yu Chen and L. Feigl and J. Kelly and Erik Lucero and Matteo Mariantoni and P. J. J. O'Malley and D. Sank and A. Vainsencher and J. Wenner and T. C. White and Y. Yin and J. Zhao and C. J. Palmstrøm and John M. Martinis and A. N. Cleland}, year = {2012}, doi = {10.1063/1.3693409}, url = {https://arxiv.org/abs/1201.3384}, note = {Source identifier: 1201.3384} }