@misc{indiciae03e06667d1a1,
  title = {Z-Axis Optomechanical Accelerometer},
  author = {David N. Hutchison and Sunil A. Bhave},
  year = {2012},
  doi = {10.1109/memsys.2012.6170263},
  url = {https://arxiv.org/abs/1202.0233},
  note = {Source identifier: 1202.0233}
}