TY  - RPRT
TI  - Z-Axis Optomechanical Accelerometer
AU  - David N. Hutchison
AU  - Sunil A. Bhave
PY  - 2012
DO  - 10.1109/memsys.2012.6170263
UR  - https://arxiv.org/abs/1202.0233
ID  - 1202.0233
ER  -