@misc{indiciae78f6fc704996,
  title = {Design and Fabrication of Micromachined Resonators},
  author = {Ritesh Ray Chaudhuri and Joydeep Basu and Tarun Kanti Bhattacharyya},
  year = {2012},
  url = {https://arxiv.org/abs/1202.3048},
  note = {Source identifier: 1202.3048}
}