TY  - RPRT
TI  - Design and Fabrication of Micromachined Resonators
AU  - Ritesh Ray Chaudhuri
AU  - Joydeep Basu
AU  - Tarun Kanti Bhattacharyya
PY  - 2012
UR  - https://arxiv.org/abs/1202.3048
ID  - 1202.3048
ER  -