@misc{indiciae3204420a56fc,
  title = {The Integration of High-k Dielectric on Two-Dimensional Crystals by Atomic Layer Deposition},
  author = {Han Liu and Kun Xu and Xujie Zhang and Peide D. Ye},
  year = {2012},
  doi = {10.1063/1.3703595},
  url = {https://arxiv.org/abs/1202.3391},
  note = {Source identifier: 1202.3391}
}