@misc{indiciae6e75be728415, title = {Application of hydrogenation to low-temperature cleaning of the Si(001) surface in the processes of molecular-beam epitaxy: Investigation by STM, RHEED and HRTEM}, author = {L. V. Arapkina and L. A. Krylova and K. V. Chizh and V. A. Chapnin and O. V. Uvarov and V. A. Yuryev}, year = {2012}, doi = {10.1063/1.4732073}, url = {https://arxiv.org/abs/1202.6224}, note = {Source identifier: 1202.6224} }