TY - RPRT TI - Application of hydrogenation to low-temperature cleaning of the Si(001) surface in the processes of molecular-beam epitaxy: Investigation by STM, RHEED and HRTEM AU - L. V. Arapkina AU - L. A. Krylova AU - K. V. Chizh AU - V. A. Chapnin AU - O. V. Uvarov AU - V. A. Yuryev PY - 2012 DO - 10.1063/1.4732073 UR - https://arxiv.org/abs/1202.6224 ID - 1202.6224 ER -