@misc{indiciaec54d453a4996,
  title = {SLID-ICV Vertical Integration Technology for the ATLAS Pixel Upgrades},
  author = {A. Macchiolo and L. Andricek and H. G. Moser and R. Nisius and R. H. Richter and P. Weigell},
  year = {2012},
  url = {https://arxiv.org/abs/1202.6497},
  note = {Source identifier: 1202.6497}
}