@misc{indiciae1d5416542e4f,
  title = {White Light Interferometry for Quantitative Surface Characterization in Ion Sputtering Experiments},
  author = {S. V. Baryshev and A. V. Zinovev and C. E. Tripa and R. A. Erck and I. V. Veryovkin},
  year = {2012},
  doi = {10.1016/j.apsusc.2012.03.144},
  url = {https://arxiv.org/abs/1204.0808},
  note = {Source identifier: 1204.0808}
}