TY  - RPRT
TI  - White Light Interferometry for Quantitative Surface Characterization in Ion Sputtering Experiments
AU  - S. V. Baryshev
AU  - A. V. Zinovev
AU  - C. E. Tripa
AU  - R. A. Erck
AU  - I. V. Veryovkin
PY  - 2012
DO  - 10.1016/j.apsusc.2012.03.144
UR  - https://arxiv.org/abs/1204.0808
ID  - 1204.0808
ER  -