@misc{indiciae83a86dd4ada7, title = {Frequency and phase noise of ultra-high Q silicon nitride nanomechanical resonators}, author = {King Y. Fong and Wolfram H. P. Pernice and Hong X. Tang}, year = {2012}, doi = {10.1103/physrevb.85.161410}, url = {https://arxiv.org/abs/1204.1942}, note = {Source identifier: 1204.1942} }