TY  - RPRT
TI  - Frequency and phase noise of ultra-high Q silicon nitride nanomechanical resonators
AU  - King Y. Fong
AU  - Wolfram H. P. Pernice
AU  - Hong X. Tang
PY  - 2012
DO  - 10.1103/physrevb.85.161410
UR  - https://arxiv.org/abs/1204.1942
ID  - 1204.1942
ER  -