TY  - RPRT
TI  - High-Q silicon optomechanical microdisk resonators at gigahertz frequencies
AU  - Xiankai Sun
AU  - Xufeng Zhang
AU  - Hong X. Tang
PY  - 2012
DO  - 10.1063/1.4709416
UR  - https://arxiv.org/abs/1204.3605
ID  - 1204.3605
ER  -