@misc{indiciae7dbd9d36fde0,
  title = {Integrated high frequency aluminum nitride optomechanical resonators},
  author = {Chi Xiong and Xiankai Sun and King Y. Fong and Hong X. Tang},
  year = {2012},
  doi = {10.1063/1.4707898},
  url = {https://arxiv.org/abs/1204.4203},
  note = {Source identifier: 1204.4203}
}