TY  - RPRT
TI  - Integrated high frequency aluminum nitride optomechanical resonators
AU  - Chi Xiong
AU  - Xiankai Sun
AU  - King Y. Fong
AU  - Hong X. Tang
PY  - 2012
DO  - 10.1063/1.4707898
UR  - https://arxiv.org/abs/1204.4203
ID  - 1204.4203
ER  -