@misc{indiciaea225ce68a25c,
  title = {Intrinsic Origin of Negative Fixed Charge in Wet Oxidation for Silicon Carbide},
  author = {Yasuhiro Ebihara and Kenta Chokawa and Shigenori Kato and Katsumasa Kamiya and Kenji Shiraishi},
  year = {2012},
  doi = {10.1063/1.4722782},
  url = {https://arxiv.org/abs/1204.5556},
  note = {Source identifier: 1204.5556}
}