TY  - RPRT
TI  - Intrinsic Origin of Negative Fixed Charge in Wet Oxidation for Silicon Carbide
AU  - Yasuhiro Ebihara
AU  - Kenta Chokawa
AU  - Shigenori Kato
AU  - Katsumasa Kamiya
AU  - Kenji Shiraishi
PY  - 2012
DO  - 10.1063/1.4722782
UR  - https://arxiv.org/abs/1204.5556
ID  - 1204.5556
ER  -