@misc{indiciae8f4929f9964a,
  title = {High resolution SIMS depth profiling of nanolayers},
  author = {S. V. Baryshev and A. V. Zinovev and C. E. Tripa and M. J. Pellin and Q. Peng and J. W. Elam and I. V. Veryovkin},
  year = {2012},
  url = {https://arxiv.org/abs/1204.6252},
  note = {Source identifier: 1204.6252}
}