@misc{indiciaed9b789380f50,
  title = {High-Q aluminum nitride photonic crystal nanobeam cavities},
  author = {W. H. P. Pernice and C. Xiong and C. Schuck and H. X. Tang},
  year = {2012},
  doi = {10.1063/1.3690888},
  url = {https://arxiv.org/abs/1205.1405},
  note = {Source identifier: 1205.1405}
}