@misc{indiciae15792673fed1,
  title = {High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics},
  author = {Wolfram H. P. Pernice and Chi Xiong and Hong X. Tang},
  year = {2012},
  doi = {10.1364/oe.20.012261},
  url = {https://arxiv.org/abs/1205.1665},
  note = {Source identifier: 1205.1665}
}