@misc{indiciae78afe595bebd,
  title = {New DRIE-Patterned Electrets for Vibration Energy Harvesting},
  author = {S. Boisseau and A. -B. Duret and J. -J. Chaillout and G. Despesse},
  year = {2012},
  doi = {10.1051/epjconf/20123302010},
  url = {https://arxiv.org/abs/1205.2383},
  note = {Source identifier: 1205.2383}
}