TY  - RPRT
TI  - New DRIE-Patterned Electrets for Vibration Energy Harvesting
AU  - S. Boisseau
AU  - A. -B. Duret
AU  - J. -J. Chaillout
AU  - G. Despesse
PY  - 2012
DO  - 10.1051/epjconf/20123302010
UR  - https://arxiv.org/abs/1205.2383
ID  - 1205.2383
ER  -