@misc{indiciaeef332be7b693,
  title = {Etch Induced Microwave Losses in Titanium Nitride Superconducting Resonators},
  author = {Martin Sandberg and Michael R. Vissers and Jeffrey S. Kline and Martin Weides and Jiansong Gao and David S. Wisbey and David P. Pappas},
  year = {2012},
  doi = {10.1063/1.4729623},
  url = {https://arxiv.org/abs/1205.3153},
  note = {Source identifier: 1205.3153}
}