TY - RPRT TI - Wide Stiffness Range Cavity Optomechanical Sensors for Atomic Force Microscopy AU - Yuxiang Liu AU - Houxun Miao AU - Vladimir Aksyuk AU - Kartik Srinivasan PY - 2012 DO - 10.1364/oe.20.018268 UR - https://arxiv.org/abs/1205.3215 ID - 1205.3215 ER -