@misc{indiciae13d172bc642a,
  title = {Measuring roughness of buried interfaces by sputter depth profiling},
  author = {S. V. Baryshev and J. A. Klug and A. V. Zinovev and C. E. Tripa and J. W. Elam and I. V. Veryovkin},
  year = {2012},
  doi = {10.1088/0957-4484/24/1/015708},
  url = {https://arxiv.org/abs/1205.4045},
  note = {Source identifier: 1205.4045}
}