TY  - RPRT
TI  - Measuring roughness of buried interfaces by sputter depth profiling
AU  - S. V. Baryshev
AU  - J. A. Klug
AU  - A. V. Zinovev
AU  - C. E. Tripa
AU  - J. W. Elam
AU  - I. V. Veryovkin
PY  - 2012
DO  - 10.1088/0957-4484/24/1/015708
UR  - https://arxiv.org/abs/1205.4045
ID  - 1205.4045
ER  -