@misc{indiciae44263c2ef7a7,
  title = {Ion beam lithography for Fresnel zone plates in X-ray microscopy},
  author = {Kahraman Keskinbora and Corinne Grévent and Michael Bechtel and Markus Weigand and Eberhard Goering and Achim Nadzeyka and Lloyd Peto and Stefan Rehbein and Gerd Schneider and Rolf Follath and Joan Vila-Comamala and Hanfei Yan and Gisela Schütz},
  year = {2014},
  doi = {10.1364/oe.21.011747},
  url = {https://arxiv.org/abs/1205.4502},
  note = {Source identifier: 1205.4502}
}