@misc{indiciaeb2eaa00a0ec3,
  title = {Comparison of capacitive and frequential readout when scaling accelerometers down from Micro- to Nano- Electro Mechanical Systems},
  author = {Sébastien Hentz and Laurent Duraffourg and Eric Colinet},
  year = {2012},
  url = {https://arxiv.org/abs/1205.4860},
  note = {Source identifier: 1205.4860}
}