TY  - RPRT
TI  - Comparison of capacitive and frequential readout when scaling accelerometers down from Micro- to Nano- Electro Mechanical Systems
AU  - Sébastien Hentz
AU  - Laurent Duraffourg
AU  - Eric Colinet
PY  - 2012
UR  - https://arxiv.org/abs/1205.4860
ID  - 1205.4860
ER  -