@misc{indiciae555925500f21, title = {Fabrication and Electrical Characterization of Fully CMOS Si Single Electron Devices}, author = {P. J. Koppinen and M. D. Stewart, Jr. and Neil M. Zimmerman}, year = {2012}, doi = {10.1109/ted.2012.2227322}, url = {https://arxiv.org/abs/1206.2872}, note = {Source identifier: 1206.2872} }