@misc{indiciae0a061b0ec3bc,
  title = {Dual functions of anti-reflectance and surface passivation of the atomic layer deposited Al2O3 films on crystalline silicon substrates},
  author = {Li Qiang Zhu and Xiang Li and Zhong Hui Yan and Hong Liang Zhang and Qing Wan},
  year = {2012},
  doi = {10.1109/led.2012.2219491},
  url = {https://arxiv.org/abs/1207.0619},
  note = {Source identifier: 1207.0619}
}