@misc{indiciae9d53de1b3fd0,
  title = {Enhanced Resolution of Poly-(Methyl Methacrylate) Electron Resist by Thermal Processing},
  author = {Nima Arjmandi and Liesbet Lagae and Gustaaf Borghs},
  year = {2012},
  doi = {10.1116/1.3167367},
  url = {https://arxiv.org/abs/1207.3183},
  note = {Source identifier: 1207.3183}
}