TY  - RPRT
TI  - Enhanced Resolution of Poly-(Methyl Methacrylate) Electron Resist by Thermal Processing
AU  - Nima Arjmandi
AU  - Liesbet Lagae
AU  - Gustaaf Borghs
PY  - 2012
DO  - 10.1116/1.3167367
UR  - https://arxiv.org/abs/1207.3183
ID  - 1207.3183
ER  -